Bijlage bij beantwoording technische vragen (PvdD) - 2023 Annual Report based on IFRS (FINAL compressed)

– Valued partner in our communities Read more on page 145 >

– Valued partner in our communities Read more on page 145 >

SDG 8

Decent work and economic growth Promote sustained, inclusive and sustainable economic growth, full and productive employment and decent work for all Our contribution

SDG 12

Responsible consumption and production

Ensure sustainable consumption and production patterns Our contribution

– Attractive workplace for all Read more on page 106 >

– Circular economy Read more on page 90 >

– Responsible supply chain Read more on page 125 >

– Responsible supply chain Read more on page 125 >

– ESG integrated governance Read more on page 155 >

– ESG integrated governance Read more on page 155 >

SDG 9

Industry, innovation and infrastructure

Build resilient infrastructure, promote inclusive and sustainable industrialization, and foster innovation

SDG 13

Climate action

Take urgent action to combat climate change and its impacts by regulating emissions and promoting developments in renewable energy

Our contribution

Our contribution

– Innovation ecosystem Read more on page 136 >

– Energy efficiency and climate action Read more on page 75 > – Responsible supply chain Read more on page 125 >

73

ASML ANNUAL REPORT 2023

ENVIRONMENTAL

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Environmental at a glance We are committed to reducing the environmental footprint of our operations and supply chain as well as the environmental impacts of our products and services.

ENVIRONMENTAL 75 Energy efficiency and climate action 79 83 84 85 90 93 94 96 98 102

Scope 1 and 2 emissions from our own operations – Manufacturing and buildings Scope 3 emissions from our own operations – Business travel and commuting Scope 3 emissions from our supply chain (including logistics) Scope 3 emissions from product use at our customers Circular economy Prevent waste Extend the lifetime of our products Reuse resources Recycle materials Water management

Energy efficiency and climate action We are working to reduce our carbon footprint to achieve net zero emissions across our value chain by 2040.

Broadening energy efficiency efforts across our product portfolio.

Circular economy We aim to maximize the value of our systems, reusing resources as much as possible, while minimizing waste, decoupling our growth from resource consumption, and recycling materials.

Aiming for zero waste from operations to landfill or incineration by 2030.

74

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Energy efficiency and climate action We are working to reduce our carbon footprint to achieve net zero emissions across our value chain by 2040.

IN THIS SECTION 78 79 83 84 85

Our overall performance in 2023 Scope 1 and 2 emissions from our own operations – Manufacturing and buildings Scope 3 emissions from our own operations – Business travel and commuting Scope 3 emissions from our supply chain (including logistics) Scope 3 emissions from product use at our customers

Why it matters As the world turns to technology to help solve its pressing challenges, our goal is to expand the availability of computing power and data storage capability while reducing the environmental footprint of our operations, our supply chain, and from the use of our products and services. The growing demand for enhanced chip functionality means that the complexity and energy consumption of the overall microchip patterning process is increasing. Aiming for net zero emissions across our entire value chain by 2040 while energy demand is increasing is a complex challenge that can only be achieved by working closely with our partners, suppliers, customers and other stakeholders. Our ambition is to achieve carbon neutrality with net zero emissions across our manufacturing and buildings (scope 1 and 2) by 2025. With regard to scope 3, we aim to achieve net zero emissions from business travel and commuting (travel to and from work) by 2025, in our supply chain (scope 3 upstream) by 2030, and from the use of our products and services by customers (scope 3 downstream) by 2040.

How we’re managing our impact

We measure our performance in the following ways:

Our goal is to reduce our climate impacts, working closely together with our peers in the entire semiconductor value chain – in our own operations together with our suppliers, in our customers’ production process and through reducing the energy used by semiconductors in operation by enabling scaling. Increasing energy efficiency is one of the key levers – our efforts range from optimizing the technical installations in our buildings to supplying more energy-efficient products (in terms of energy spent per wafer exposure) to customers. Other ways we are working to reduce our GHG emissions include reducing business travel, commuting more sustainably, using renewable electricity and minimizing our use of natural gas by reusing waste heat and electrification.

• Scope 1 and 2 CO2e emissions • Scope 3 CO2e emissions • Scope 3 CO2e emissions intensity (per €m gross profit) • Scope 3 CO2e emissions intensity (per €m revenue) • NXE energy use per exposed wafer Our environmental management system We have implemented an environmental management system (EMS) to monitor energy use and emissions and improve performance and enhance efficiency across our global operations. The EMS is integrated into the overall environmental, health and safety (EHS) management system operated by all ASML facilities. This system was recertified for ISO 14001 (the standard for environmental management systems) in 2023 and structured in accordance with ISO 45001 (the standard for occupational health and safety management systems) requirements.

35.1 kt

15.0 Mt

1.06 kt

0.55 kt

7.7 kWh

Scope 1 and 2 CO2e emissions

Scope 3 CO2e emissions

Scope 3 CO2e emissions intensity

Net scope 3 CO2e emissions intensity

NXE energy use per wafer pass

(2025 target: net zero)

(2040 target: net zero)

(per €m gross profit)

(per €m revenue)

(NXE:3600D, measured in 2023)

(2025 target: 1.016)

(2025 target: 5.1 kWh)

75

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Energy efficiency and climate action (continued)

Our journey to net zero emissions in our value chain We have set a target to achieve net zero emissions in our value chain by 2040. Our approach to achieving this is based on three principles:

The diagram below illustrates our journey to net zero emissions in our value chain: 2025

We use natural gas resulting in direct emissions (scope 1). In some parts of the world, we have been unable as of yet to buy green electricity. This results in local emissions caused by fossil power plants (scope 2).

1 Reduce energy use and innovate to achieve greater energy efficiency by redesigning our assets, products and processes. 2 Aim to lead the shift toward 100% credible, renewable energy.

2025

3 Compensate for residual emissions if no reasonable other improvement actions are available. We will need to work closely with our customers, suppliers and partners to achieve the milestones in our journey to net zero emissions in our value chain.

Net zero scope 1 and 2 emissions from manufacturing and buildings

Net zero scope 3 emissions from business travel and commuting Emissions from employees traveling to our customers, suppliers and other parts of ASML, and from employees traveling to and from work.

2030

As part of our journey to net zero emissions, we are a signatory to the Science Based Targets initiative (SBTi) and we currently have two SBTi-approved near-term targets. These are:

Net zero scope 3 emissions from our supply chain (including logistics) A significant portion of our GHG emissions are generated indirectly in our supply chain, as we mainly assemble modules that we source from suppliers. Parts and modules have to be transported to us or our customers directly, and our assembled systems are shipped from ASML premises to customers. As today’s freight logistics, especially air transportation, are still carbon-intensive, a significant part of our supply chain emissions stem from logistics (operated by our logistics suppliers).

• Reduction of 25.2% of our combined scope 1 and 2 emissions in 2025, compared to base year 2019, without offsetting • Reduction of 35.3% in scope 3 intensity (emissions per unit of gross profit) in 2025 compared to 2019, without offsetting 2040

Net zero scope 3 emissions from product use at our customers The largest portion of our indirect emissions arises during use of our systems at customers’ factories. Our customers are not always able to use 100% renewable electricity to run their business.

76

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Energy efficiency and climate action (continued)

We identify and assess the impact of climate-related risks and opportunities using the assessment guidelines of the Task Force on Climate-related Financial Disclosures (TCFD). Read more in our TCFD Recommendations – Climate-related disclosure, available at asml.com

Alongside our efforts to lower our carbon footprint, we are committed to using our innovations and digital technologies to enable the wider semiconductor industry to reduce its overall environmental footprint.

Our participation in the annual Carbon Disclosure Project (CDP) assessment helps steer our environmental initiatives. CDP runs the global disclosure system that drives actions and transparency for environment impacts. Our score in the most recent CDP Climate Change 2023 questionnaire was B, with C being the global average. We continuously aim to improve and execute emissions reduction plans throughout the value chain to achieve our net zero commitment, aiming to maintain good progress in fighting climate change and to be recognized by the CDP in the A-list.

How semiconductors support climate action While we measure and aim to reduce the impacts of our operations, supply chain and product use, ASML’s climate impacts extend far beyond these areas to include the benefits and risks that our technology brings to society. The technology pioneered by our R&D teams and partners sits at the heart of global digitalization and has the potential to transform how we all live and work. We enable our customers to innovate the semiconductor technologies that can help humanity manage its challenges and seize opportunities by facilitating sustainable living and mobility, accessible healthcare, food security and the transition to renewable energy. For example, semiconductors are harnessing, converting, transferring and storing energy from sources such as solar and wind power as electricity and helping to ensure that national power grids are both responsive and robust.

Mitigating climate change means reducing energy demand by developing end-use applications that are as energy efficient as possible. Digital technology can help businesses and citizens cut energy consumption and save money. Smart sensors can detect room occupancy, allowing lights and heating to be switched off and on automatically. Smartphone applications make it possible for people to remotely control their appliances or get from A to B through car-sharing, ride-sharing or other demand-driven, flexible ways of transportation. And as we transition away from fossil fuels, electric vehicles will become the norm and will require new, potentially diverse electronic solutions. On the adverse side, we acknowledge the effects of digital technologies that increase energy demand, such as AI, IoT, blockchain and cryptocurrency mining.

77

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

78

Energy efficiency and climate action (continued)

On track

•

Ongoing focus area n

Our overall performance in 2023 Progress tracking Topic

Climate action

Target 2025

Performance indicator

Net zero Net zero Net zero (2040)

Scope 1 – Direct emissions from fossil fuels in our operations (kt) Scope 2 – Indirect emissions from energy consumption (kt) [market-based]2 Scope 3 – Indirect emissions from total value chain (kt)3 Total footprint (in kt)1

Energy efficiency

2021

2022

2023

Status

19.3 20.1 11,426.2 11,465.6

17.3 20.8 11,936.3 11,974.4

19.2 15.9 15,025.2 15,060.3

• •

0.61 1.165 n/a

0.56 1.116 2.6

0.55 1.060 1.6

n/a

n n

No target 1.016 No target

Scope 3 CO2e emissions intensity (per €m revenue)3 Scope 3 CO2e emissions intensity (per €m gross profit)3 Reduction in GHG emissions from projects (kt)

5.1 No target No target

Products – NXE energy use per wafer pass (in kWh) Products – NXT energy use per wafer pass (in kWh)4 Energy consumption (in TJ)

8.3 (NXE:3600D) 0.56 (NXT:1980Ei) 1,689

8.3 (NXE:3600D) 0.55 (NXT:2100i) 1,633

7.7 (NXE:3600D) 0.52 (NXT:1980Fi) 1,729

100 TJ 100%

Energy savings worldwide through projects (in TJ)5 Renewable electricity (of total electricity purchased)

12.7 92%

31.7 91%

47.3 91%

(10)% No target

Energy consumption (NXE) (reduction in % of baseline 2018 1.4 MW) Throughput (in wph) (NXE)

(6)% (NXE:3600D) 160 (NXE:3600D)

(6)% (NXE:3600D) (12)% (NXE:3600D) 160 (NXE:3600D) 160 (NXE:3600D)

n/a

(60)%

Energy use per wafer pass (NXE) (reduction in % of baseline 2018)6

(35)% (NXE:3600D) (35)% (NXE:3600D) (40)% (NXE:3600D)

n

•

n/a n

n/a n/a

• n

n

1. The guidance from the GHG Protocol – the organization that provides widely used international standards for emissions reporting – is used for the calculation of the emission scope. Market-based conversion factors are used to calculate the scope 2 CO2e emissions in kt. 2. We report the market-based emissions after purchase of renewable electricity – the electricity is proven emission-free by tracking energy attribute certificates. ASML currently does not compensate any emissions, resulting in no differences between our gross and net emissions. 3. The 2023 figure includes nine months of actual data and three months of estimates. The 2022 figure has been adjusted with data for the entire year (11,900 kt best estimate in the 2022 Annual Report). The 2021 figure has been adjusted to report the exact figure instead of a rounded figure. 4. Since 2023, when we measure the energy efficiency of our DUV immersion and DUV dry systems, the laser is included within the measurement. The comparative figures have been revised. 5. In 2021, we started a new master plan period for 2021-2025, with a target to achieve 100 TJ energy savings by the end of 2025. The savings reported are cumulated compared with the base year; therefore, they are not comparable between years. 6.

The baseline figure of the NXE:3400B energy use per exposed wafer pass has been corrected, from 13.08 kWh to 12.8 kWh, due to an incorrect rounding being used in the past.

Read more in Non-financial statements – Non-financial indicators – Energy efficiency and climate action

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Energy efficiency and climate action (continued) Scope 1 and 2 emissions from our own operations – Manufacturing and buildings

How we’re managing our impact

Our targets and performance in 2023

As we work toward net zero emissions in our value chain, our most immediate task is to manage the climate impacts of our own operations and buildings.

Our target is to achieve net zero scope 1 and 2 emissions by 2025. This target exceeds the reductions needed to limit global warming to 1.5°C. We report market-based emissions after purchase of renewable electricity – the electricity is proven emission-free by tracking energy attribute certificates (EACs).

Scope 1 emissions comprise direct CO2 emissions from use of fossil fuels – mainly natural gas – in our operations. The majority of natural gas consumption is used for heating our buildings and for humidification of our cleanrooms. Scope 2 emissions arise from our purchased electricity, which accounts for 80% of the energy we use at ASML. Most of our electricity consumption relates to the manufacturing of chipmaking equipment – assembly and testing of lithography, metrology and inspection systems – and maintaining consistent climate conditions such as temperature, humidity and air quality. We aim to achieve our targets for scope 1 and 2 by: 1 Reducing energy consumption 2 Using renewable energy 3 Compensating CO2 emissions

Despite an increase in our electricity and gas consumption due to company growth of 30.2%, the share of renewable electricity remained comparable to 2022 at around 91.4%. For the third year in a row, our net scope 1 and 2 CO2 emissions have decreased – from 39.4 kt in 2021 and 38.1 kt in 2022 to 35.1 kt in 2023. This decrease in 2023 was due to a combination of business growth (2 kt) and adding process CO2 emissions (1 kt) to scope 1 reporting, consistent with reporting guidelines, compensated by a 4.9 kt reduction in Taiwan following a change in contract in 2022 to reduce our CO2 (reduction of CO2 emission scope 2), and a 1.1 kt reduction due to our energy savings master plan.

Our actions in 2023 1. Reducing energy consumption and use of natural gas Our energy-saving master plan covers each of our five largest industrial sites and includes over 80 projects. It aims to reduce energy consumption through direct annual savings of at least 100 TJ (or 5 kt CO2e). The main components of the master plan are improving the efficiency of our technical installations used for our operation, and optimizing our portfolio by building new offices that meet the latest green building standards, such as BREEAM (Building Research Establishment Environmental Assessment Method) in Europe, LEED (Leadership in Energy and Environmental Design) in the US or G-SEED (Green Standard for Energy and Environmental Design) in South Korea. We are also investing in renewable energy production at our sites. Reducing our use of natural gas is a key objective. We have a multi-year project to implement an energy grid to reuse waste heat from our factories and offices on our site in Veldhoven. The energy grid is a two-pipe loop that makes waste heat available for heating in winter and energy-efficient cooling in summer. Based on our plans, we estimate that the use of natural gas in Veldhoven will be reduced from around 4.9 million m3 to around 1.2 million m3 in the next three to four years, driven by the energy grid and other energy-saving measures.

As we grow as a company, we strive to optimize our real estate portfolio because our buildings account for a significant percentage of our scope 1 and 2 emissions. When building new offices and manufacturing sites, we seize the opportunity to make them sustainable, and several of our existing buildings have been assessed for performance against BREEAM guidelines. Two additional buildings in the Netherlands achieved a BREEAM 'Excellent' rating in 2023: our logistic center and one large office building. Five more buildings are in the process of achieving a BREEAM 'Excellent' rating in 2024. With an eye on future growth, our new campus in Veldhoven is being designed with a strong focus on sustainability. We are applying the latest building sustainability standards to our real estate worldwide, wherever possible. Besides the Netherlands, we have projects ongoing in South Korea (G-SEED) and Taiwan (LEED).

79

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Energy efficiency and climate action (continued) Scope 1 and 2 emissions from our own operations – Manufacturing and buildings (continued)

Key projects in 2023 In 2023, as part of our energy savings master plan, we executed key projects in the Netherlands, the US and Taiwan which resulted in around 16 TJ annual energy savings. The total energy savings delivered by projects executed between 2021 and 2023 amounted to 47 TJ. In 2023, if we include part of the savings realized by projects started in 2022 and not accounted for in 2022, we realized savings of: • 11 TJ per year through operationalizing systems of the energy grid and implementing H2 venting in two manufacturing buildings in Veldhoven • 3 TJ per year in Wilton by installing sand filters on cooling towers • 1 TJ in San Diego through the installation of solar panels • 1 TJ in Taiwan factories by optimizing the operation of cooling installations and replacing ventilation systems The remaining 31 TJ is from savings realized by projects executed in 2021 and 2022.

2. Using renewable energy We are driving a shift to renewable energy by increasing the share of direct green energy purchases (so-called bundled renewable electricity) from renewable electricity generated close to our premises. In the Netherlands, we are in the third year of a 10-year purchase agreement for green electricity for our installations. This enables us to achieve our goal of using 100% renewable electricity in the country. In 2023, 100% of the electricity used in our US and Chinese facilities was also from renewable sources. In 2023, we managed to secure a long-term power purchase agreement (PPA) in Taiwan. The contract will be operational in 2024 and help us with our aim to reduce our emissions, with 16 kt on a yearly basis as of 2025. We continue to face challenges in South Korea, where there is little to no credible renewable electricity.

100% of the electricity used in the EU, US and China was from renewable sources 3. Compensating for CO2 emissions We aim to reduce energy consumption and use renewable energy as much as possible. Where this is not feasible, we intend to purchase voluntary emission reduction certificates (VERs) no later than 2025.

Promoting industry-wide collaboration to reduce GHG emissions across the value chain Established in November 2022 with ASML as a founding member, the Semiconductor Climate Consortium aims to address the challenges of climate change and speed up the industry’s efforts to reduce GHG emissions throughout the value chain. Founding members have affirmed their support of the Paris Agreement and related accords driving the 1.5⁰C pathway. The consortium’s members are committed to working toward the following pillars and objectives: Transparency – Publicly report progress and scope 1, 2 and 3 emissions annually Ambition – Set near- and long-term decarbonization targets with the aim of reaching net zero emissions by 2040 Collaboration – Align on common approaches, technology innovations and communication channels to continuously reduce GHG emissions On September 20, 2023, the SCC published its first report providing an in-depth analysis of the semiconductor value chain’s carbon footprint and priority-ranked carbon emission sources for the industry to address. The main takeaways include: 1.Baseline of value chain emissions: Semiconductor devices produced in 2021 have a lifetime CO2e footprint of 500 Mt – 16% from supply chain, 21% from manufacturing and 63% from device use.

2.Low-carbon energy is a key lever: Bold and decisive investments in low-carbon energy sources can address more than 80% of industry emissions primarily

by reducing the carbon footprint stemming from electricity usage for semiconductor manufacturing and for powering chips in electronics devices. 3.Investment and innovation to solve remaining 16%: Reducing emissions from the supply chain and from manufacturing process gases will require considerable R&D, necessitating investments now. 4.Future manufacturing emissions scenarios: Current government and company commitments will substantially reduce manufacturing emissions, but they are still forecasted to overshoot the carbon budget for the 1.5°C pathway. 5.Dilemma of value chain emissions: Digital technologies that require semiconductors play a crucial role in reducing energy use and emissions across industries while simultaneously adding to the overall carbon footprint. Read more at the Semiconductor Climate Consortium (SCC) website

80

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

81

Energy efficiency and climate action (continued) Scope 1 and 2 emissions from our own operations – Manufacturing and buildings (continued)

Looking ahead

We have signed a five-year Corporate Power Purchase Agreement (CPPA) in Taiwan with the aim of providing our operations there with about 70% renewable electricity in 2024. Since we do not use gas in Taiwan, our ambition is to reach 100% renewable by the end of 2025. While the renewable electricity market in South Korea is limited, we will continue to look for alternative solutions to procure renewable energy in South Korea and will use offsetting in case we are not able to reach our net zero target.

In the coming years, we plan to expand the use of solar panels on our sites in EMEA, the US and Asia. We aim to have more than 20,000 solar panels on our roofs by 2025. This would give us a total energy saving of around 40 TJ per year and a total CO2 emission reduction of around 5 kt per year. This is equivalent to the energy use of (on average) 3,900 households per year, taking 2,100 cars off the road or planting around 250,000 new trees (around six trees for every ASML employee). Lastly, we are working on a plan for compensating our emissions to reach net zero scope 1 and 2 emissions by 2025. We will also work toward reporting on the environmental footprint of our approximately 160 buildings globally, which include ASML-owned buildings such as manufacturing buildings, offices and a few warehouses and buildings leased by ASML. In 2023, we identified our impact on the environment through emission of nitrogen oxides (NOx), non-methane volatile organic compounds (NMVOC) and hydrogen (H2) from manufacturing as a new material topic. We are developing a process to formally manage and report this topic starting in 2024.

How we get to net zero emissions by 2025 50 10

40

39

45

38 35

GHG emissions (in kt CO2e)

Our energy savings master plan will continue to provide savings in 2024-2025. In 2024, we expect an acceleration of the energy-saving projects in the five-year energy master plan. These include installation of solar panels in San Diego that are expected to lead to 8 TJ per year savings in 2024, while the operationalization of the energy grid and renovation of buildings in the Netherlands are expected to lead to an additional 25 TJ per year at the end of 2024. We believe that this will enable us to achieve our target of 100 TJ (or 5 kt CO2e) per year by 2025.

30 -16

-5 20 -4

10

-20 0 2021 level

2022 level

2023 level

Growth & scope change

2025 without a plan

Renewable electricity Taiwan

Energy savings master plan

Renewable electricity South Korea

Offsets

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

82

Energy efficiency and climate action (continued) Scope 3 emissions: An introduction

Reducing upstream and downstream scope 3 emissions

Our scope 3 intensity for 2023 was 1,060 tonnes CO2e per € million gross profit (2022: 1,116 tonnes). Our results indicate that the scope 3 emissions account for 15.0 Mt, or 99.8%, of our total emissions footprint (scope 1, 2 and 3). Of this, 5.5 Mt are ‘upstream’ emissions (mainly related to the goods and services we buy and ship), 0.1 Mt are from business travel and commuting, and 9.4 Mt are indirect ‘downstream’ emissions (use of sold products at our customers’ sites). As of 2023, we report indirect climate change effects of air travel (radiative forcing, non-CO2 emissions) separately and not as part of our scope 3 emissions. This is to align with current reporting practices of airlines and in line with recommendations from SBTi. This has resulted in comparative figures being updated. Read more in Non-financial statements – Non-financial indicators – Energy efficiency and climate action

We are still on track to achieve our SBTi target of 1,016 tonnes CO2e per € million gross profit in 2025. On the following pages you can read more about how we're tackling scope 3 emissions specifically related to business travel and commuting, our supply chain, and through the use of our products by customers.

16,000 14,000

2.000 1.557

12,000

GHG emission (in kt)

Our overall target for 2025 is to reduce the intensity of scope 3 emissions to 1,016 tonnes CO2e per € million gross profit, in line with our SBTi commitment. This represents a 35.3% intensity reduction compared with 2019.

Our overall emissions are increasing due to the growth of ASML. We expect emissions to continue rising in the short term due to our continued growth and more complex products. To ensure that we meet our ambition for net zero emissions by 2040, we need to work closely with our value chain partners, for example on increasing the capacity of renewable electricity in some regions of the world.

1.165

10,000 8,000 6,000

1.500

1.273

7,355 5,219

1.116

9,443 1.060

7,053

5,484

1.000 124

110 4,000 2,000

40 150

45

2,850

3,126

2019

2020

4,031

0.500 4,773

5,458

2022

2023

0

0.000

Sourcing and supply chain

2021 Business travel and commuting)

Our overall target for 2025 is to reduce the intensity of scope 3 emissions to 1,016 tonnes CO2e per € million gross profit, in line with our SBTi commitment.

Use of sold products

Intensity

Intensity rate (in kt per €m gross profit)

Scope 3 emissions include both upstream and downstream activities and comprise the emissions that are generated in our supply chain, through business travel and commuting, and through use of our products at our customers. We measure progress in reducing our scope 3 emissions by emission intensity, i.e. total scope 3 emissions (tonnes CO2e) against total gross profit (€ millions).

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Energy efficiency and climate action (continued) Scope 3 emissions from our own operations – Business travel and commuting

• Business travel: Reducing the volume of business travel through stricter policies, raising awareness and use of remote working and servicing options. • Commuting: To reduce the percentage of car commutes in our Veldhoven region (NL), we focus on developing a mix of sustainable commuting options by encouraging people to travel to work by bicycle or public transport. Alongside this, we provide shuttle bus services from Park & Ride locations, offer satellite offices and promote a balanced working-from-home policy.

Our targets and performance in 2023 Our target is to achieve net zero emissions from business travel and commuting by 2025. In 2023, taking into account Sustainable Aviation Fuel (SAF) purchases, our total emissions due to business travel and commuting were 70 kt CO2e and 54 kt CO2e, respectively (see graphs). Due to the increasing number of employees at all locations and the ending of COVID-19 travel restrictions, our emissions increased by 13% compared to 2022 (69 kt CO2e and 41 kt CO2e, respectively). Commuting emissions are predominantly related to commuting by car. The impact of the indirect climate change effects of air travel are excluded from our business travel emissions, as explained on the previous page.

86 GHG emissions (in kt CO2e)

We are using the following levers, aiming to reduce our impact:

100

80 69 60

70

69 56 48

40 27 20

Our actions in 2023

Looking ahead

For business travel, we created and launched a travel dashboard for managers to provide clear insights into travel cost, broken down into the underlying elements such as hotel and air travel. This dashboard aims to drive behavioral change, as it also shows the related CO2 emissions. We reduced our global travel budget per FTE by 30% from pre-COVID-19 travel patterns of 2019.

For 2024, we aim to strengthen our partnership with KLM to further reduce our emissions from aviation so that we will be able to meet ASML's ambition of net zero CO2 emissions in 2025 for business travel.

20 20 11

0 2019

2020

Air travel Hotel Taxi

2021

2022

2023

Car rental Public transport

Our annual emissions (in kt) from business travel (2019-2023)

GHG Emissions (in kt CO2e)

How we’re managing our impact

80 75 70 65 60 55 50 45 40 35 30 25 20 15 10 5 0

We stimulated green travel modes by encouraging employees to use train travel for specific destinations, such as Berlin and London. We have launched a project aiming to use SAF for air travel. In 2023, ASML purchased 4,341 tonnes of SAF, which has avoided 10,198 tonnes of CO2 emissions. From January 2024, we aim to use only electric vehicles in our rental car program in Veldhoven. In 2023, we also joined 'Anders Reizen', a coalition of more than 70 organizations in the Netherlands which aims to reduce CO2 emissions related to business travel and commuting of its members by 50% in 2030 compared to 2016.

64

56 41

2019

18

20

2020

2021

2022

Commuting Our annual emissions (in kt) from commuting (2019-2023)

2023

To enable employees in the Netherlands to commute for free between their home and work on public transport, we provided them with a business card of the Dutch railways ('Nederlandse Spoorwegen'). In addition, exclusive shuttle bus services have been set up between Eindhoven central station and the Veldhoven campus, and shared e-bikes are available as a successful, sustainable solution.

The year will also see us commence a project that will better quantify emissions from employee commuting in our operating regions outside the Netherlands. This is likely to lead to targeted interventions to further reduce the commuting emissions in later years. Where there are no alternatives, we aim to offset our residual emissions from employee commuting and business travel by purchasing VERs in the coming years.

83

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Energy efficiency and climate action (continued) Scope 3 emissions from our supply chain (including logistics)

How we’re managing our impact

Looking ahead

6,000 5,500 5,000

ESG sustainability has become a major theme in our supplier relationships. Our Sourcing & Procurement (S&P) ESG sustainability program is a key enabler in our efforts to reduce scope 3 emissions by actively engaging and collaborating with suppliers, to drive further progress. We depend on our suppliers and other upstream value chain partners to work with us to jointly reduce our carbon footprint.

Our targets and performance in 2023 In 2023, total emissions due to upstream activities (excluding business travel and commuting) were 5,458 kt CO2e, an increase of 14% from 2022 in line with our increase in sales (since we use the spend-based approach for calculating emissions). Purchased goods and services and capital goods contribute to 82% of these emissions. Most of the remaining emissions are from transportation and distribution.

621 GHG Emissions (in kt CO2e)

Reducing emissions arising from upstream activities in our supply chain – for example, by sharing data and targets – requires close collaboration with our suppliers and other upstream stakeholders.

4,500 482

4,000 463

3,500 3,000 2,500

264 268 4,460

2,000

3,928 3,305

1,500 1,000

2,362

2,604

500 0 Purchased goods and services Capital goods Fuel and energy-related activities Upstream transportation and distribution Waste generated in operations

Our scope 3 CO2e emissions in the (upstream) supply chain (2019-2023)

Our actions in 2023 Improving our scope 3 upstream emissions data quality We calculate our scope 3 emissions using guidance from the GHG Protocol – the organization that provides widely used international standards for emissions reporting. We currently use the spend-based methodology for calculating supplier emissions.

We constantly seek to improve data quality by working with our suppliers – for example, while the spend-based methodology is useful, it fails to reflect improvements that One of our future key focuses will be building on the supplier GHG emissions baseline – and we will be reduce GHG emissions. working with our top 100 suppliers toward commitment In previous years, we have seen a mix of supplier on net zero scopes 1, 2 and 3 by 2030. We will also be encouraging suppliers to develop roadmaps for improving maturity levels in reporting scope 1 and 2 emissions energy efficiency in their production processes, using data. We obtain GHG emissions data (scope 1, 2 and limited scope 3) from our suppliers. Our aim is to use this renewable energy and (as a last resort) offsetting. information to compare spend-based emissions data with actual emissions data, to help drive meaningful progress. We learned that spend-based emissions are overestimated compared to actual emissions data. As a result, our next step to improve data quality is to include actual supplier emissions data in our calculations for scope 3. It will take time before we can reliably assess all our suppliers’ scope 3 emissions data, as not all of them have visibility of their own supply chain emissions. To support them, we have introduced an IT dashboard that will capture and display the relevant data.

In 2023, we made progress by requesting CO2e emissions data directly from our suppliers through our S&P ESG sustainability program. We aim to use this data as part of our move from spend-based to hybrid-based data. In 2023 we also improved our knowledge within Development and Engineering (D&E) in estimating CO2e emissions from our suppliers by building competence on life-cycle analysis. We are investigating how to determine the impact of the design and have started developing tooling for our engineers. With this, we aim at raising awareness, finding hotspots in the design and making a start with steering for design changes.

We expect that new EU regulations and other directives around mandatory disclosure of scope 3 emissions data will help to increase transparency across our supply chain, and will result in firm actions to reduce scope 3 upstream emissions. Read more in Social – Responsible supply chain

To support the optimization of the design, in the D&E ESG sustainability program we will work toward improving the data, automating the GHG emissions calculations and providing consistent data on the design connected to a product roadmap. This will include actual supplier data where available. Also, we will aim to have a first CO2e footprint estimate available based on the design information of an ASML product.

84

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Energy efficiency and climate action (continued) Scope 3 emissions from product use at our customers

How we’re managing our impact As demand for enhanced chip functionality grows, the complexity and energy consumption of the overall microchip patterning process – including that of our lithography and metrology and inspection systems – is increasing. To measure CO2e emissions from product use, we calculate emissions generated by our customers’ electricity usage while operating ASML machines. In line with the GHG Protocol, we calculate these emissions based on the number of newly installed machines at our customers’ sites during the reporting year multiplied by the lifetime of the machine (estimated at 20 years). When we design new systems, we increasingly focus on reducing energy consumption and cost, while increasing performance and availability. The EUV light source is the key focus of our current engineering efforts, because it accounts for the largest portion of an EUV system’s total energy consumption. In addition, we have started to better assess the energy efficiency of our other product families – in DUV, metrology and inspection, computational lithography, and scanner and process control software solutions. We’re working with peers and partners – including through the SCC (read more in our case study on page 80) – to accelerate efforts to reduce GHG emissions, share knowledge and technology and stimulate the adoption of renewable energy worldwide.

Reducing energy consumption by introducing sleep mode in our lithography systems Semiconductor manufacturing processes are designed to maximize the utilization of the critical lithography systems. However, there will be times when a system is not in use. Up to now, the lithography system has remained fully powered on to ensure the system is perfectly conditioned at all times to deliver nanometeraccurate performance. In order to reduce energy consumption of our systems, we have introduced a sleep mode, which allows for powering down of subsystems to conserve energy. This does affect thermal conditioning of the system, which requires a few minutes of reconditioning to get the system fully production-ready again.

The key here is to give our customers control over a system's state. The customer has insight into when these idle periods occur, which enables them to put the lithography system into sleep mode without impacting wafer output. Triggered by a command from the fab automation system, the lithography system temporarily powers down some subsystems and then, again triggered by fab automation, returns them back to production mode in time for the next lot.

Most of the energy of an EUV lithography system is used by the CO2 drive laser, so this is a prime candidate for introducing our sleep mode solution. In the drive laser, CO2 gas is compressed and subsequently exited (via nitrogen) by radio frequency (RF) generators. A seed laser is used to trigger stimulated emission of infrared light, which is subsequently used to generate EUV light. We will soon introduce sleep mode for the RF generators. We have developed a software interface that allows our customers to send sleep and wake-up commands to the system, which power down the RF generators via internal control software. This RF sleep mode has been tested in-house, confirming the energy-saving potential as well as fully meeting system specifications immediately after the reconditioning sequence. RF sleep mode has the potential to reduce EUV system energy consumption by approximately 2.5%, averaged over time, when utilized in high-volume manufacturing at our customers' sites. The sleep mode interface will also act as a foundation for implementing sleep mode in other sub-modules, further increasing the energy-saving potential.

85

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

86

Energy efficiency and climate action (continued) Scope 3 emissions from product use at our customers (continued)

Our targets and performance in 2023

We have also set a 2025 target to reduce the energy consumption per exposed wafer by 60%, compared with the 2018 baseline (NXE:3400B). Reaching our targets has our full attention, and we plan to measure our NXE:3800E in 2024, which we expect will bring us closer to achieving our 2025 target. Based on the latest measurement of the NXE:3600D, energy use per exposed wafer pass was 7.7 kWh (versus our NXE platform 2025 target of 5.1 kWh) which shows an improvement from the last measurement taken in 2021 of 8.3 kWh. Based on the latest measurement of the NXT:1980Fi, energy use per exposed wafer pass was 0.52 kWh. In 2023, total emissions from the use of sold products were 9,443 kt CO2e, of which EUV accounted for 5,757 kt CO2e, DUV for 3,488 kt CO2e and metrology and inspection systems for 198 kt CO2e. The emissions have increased in line with an increase in sales.

9,000 1,383 8,000

GHG emissions (in kt CO2e)

Our target is to reduce the overall energy consumption of our future-generation EUV systems by 10% compared with the 2018 baseline model (NXE:3400B) by 2025, while increasing productivity.

The table below provides an overview of our systems' energy use, acceptance test protocol (ATP) throughput and energy efficiency.

10,000

DUV immersion1

Platform System type

7,000

2,047

1,153 1,257

6,000

NXT:1980Di NXT:2000i NXT:2050i NXT:1980Ei

Year of energy measurement Energy consumption (in MW) ATP throughput (in wph) Energy use per wafer pass (in kWh)

2015 0.16 275 0.59

2017 0.15 275 0.56

2020 0.16 295 0.54

NXT:1960B i + PEP-B NXT:2100i NXT:1980Fi

2021 0.16 295 0.56

2021 0.15 250 0.60

2022 0.16 295 0.55

2023 0.17 330 0.52

1,233 5,000 4,000

695

1,022

1,172

1,061

1,289

System type

3,000

5,757 4,774

2,000 3,193

4,313

3,264

1,000 0 2019 NXE PAS YieldStar

2020

DUV dry1

Platform

2021

2022

2023

NXT XT HMI

Scope 3 CO2e emissions (in kt) as a result of product use by our customers for each of our product categories

Year of energy measurement Energy consumption (in MW) ATP throughput (in wph) Energy use per wafer pass (in kWh)

XT:860M

XT:1460 NXT:1470

YieldStar

XT:860N

NXT:870 XT:400M YS350E YS375F

HMI

YS-380

YS385

eScan 1100

2017

2020

2020

2022

2022

2023

2017

2019

2020

2023

2023

0.07

0.07

0.13

0.07

0.13

0.07

0.01

0.01

0.01

0.01

0.06

240

209

277

260

330

250

n/a

n/a

n/a

n/a

n/a

0.31

0.34

0.47

0.27

0.38

0.30

n/a

n/a

n/a

n/a

n/a

Platform

EUV 20 mJ/cm2 dose

System type

NXE:3350B

NXE:3400B

NXE:3400C

NXE:3600D

NXE:3600D

2015 1.2 59 19.5

2018 1.4 107 12.8

2020 1.3 136 9.6

2021 1.3 160 8.3

2023 1.2 160 7.7

Year of energy measurement Energy consumption (in MW) ATP throughput (in wph) Energy use per wafer pass (in kWh)2

EUV 30 mJ/cm2 dose

1. Since 2023, when we measure the energy efficiency of our DUV immersion and DUV dry systems, the laser is included within the measurement. The comparative figures have been revised. 2. The baseline figure of the NXE:3400B energy use per exposed wafer pass has been corrected, from 13.08 kWh to 12.8 kWh, due to an incorrect rounding being used in the past.

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

Energy efficiency and climate action (continued) Scope 3 emissions from product use at our customers (continued)

Our actions in 2023 In 2023, we continued working on energy efficiency improvements for future products, which require long lead times and take multiple years to achieve. Progress on these projects is monitored on a quarterly basis. We proved the capability of the NXE:3600D system to reach productivity targeting 175 wph (as compared with the current specification of 160 wph). In 2024, this will be introduced to the market as the NXE:3600 PEP-D package. For our DUV systems, we identified possible energysaving options, among others around wafer stage and reticle stage magnet innovations, adaptive cooling water flows, reducing the power consumption when systems are idle (similar to the sleep mode in EUV) and reusing the otherwise directly emitted CO2 from the immersion hood in our immersion scanners. For our metrology and inspection systems, we also identified possible energy-saving options, among others around exhaust management and cooling and creating a sleep mode to reduce power consumption when systems are idle.

We also worked on improving the data quality of our inventory for scope 3 downstream emissions. This year we included the use of HMI e-beam inspection systems in our inventory. We also included the laser contribution into our reported values for DUV systems, as well as the process CO2 gas, which is released during operation of some of our immersion scanners. Operation and idle time were updated to better represent actual usage, based on customer data.

Looking ahead In 2024, we will continue to work on the energy efficiency of our systems and other product families. At the moment, we see no reason to adjust our 2025 targets regarding the energy consumption of our systems.

CORPORATE GOVERNANCE

FINANCIALS

87

ASML ANNUAL REPORT 2023

SMALL PATTERNS. BIG IMPACT.

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Sustainability is a design challenge that must be solved in parallel with system cost and performance – that’s how we will make the biggest difference.” Ton van der Net Principal Architect, D&E 25 years at ASML

A sustainability mindset Ton van der Net specializes in improving the energy efficiency and overall sustainability of lithography systems. He has been at the forefront of ASML’s sustainability efforts as they have grown from a team-led initiative to a corporate-level commitment that is becoming integral to how we develop our systems.

88

ASML ANNUAL REPORT 2023

SMALL PATTERNS. BIG IMPACT. CONTINUED

STRATEGIC REPORT

This is quite a radical change in mindset for any company. However, publications from the likes of McKinsey have shown that companies who perform well in sustainability typically outperform their competitors in market share and brand image. What’s more, around this time, ASML announced a corporate commitment aiming to have net zero emissions in our value chain by 2040. And the largest contribution to our current carbon footprint is the energy our systems use at customers.

Taking the first steps About seven years ago, in response to customers’ concerns, we started looking at the scale of the infrastructure, like cooling and power, needed to run lithography systems. These support facilities needed as much space as the production lines. When we estimated the total power they required, it was huge – around 1.3 MW for our EUV systems (as much as a few thousand Dutch homes) – and projected to grow further. Continuing that trajectory wasn’t environmentally responsible. So, a small team of ASML engineers – including me – started exploring ways to reduce energy consumption in lithography. For example, a lot of that 1.3 MW went into cooling the system and handling the hydrogen flow used to prevent contamination build-up. Was all that cooling necessary? Could we handle the hydrogen more efficiently?

Our initial list of ideas inspired ASML’s first KPI for sustainable system development. Some of these ideas looked at how the systems were used, while others required changes to the system. For example, if we redesigned the cooling features, customers could use warmer cooling water – reducing the need for power-hungry chillers.

Building a case for sustainability Any redesign would need buy-in from the business. So, we teamed up with system engineering to engage the people who make the day-to-day design decisions. These early discussions triggered us to build a business case for our ideas. That meant thinking – and encouraging others to think – about the value of our changes beyond purely financial terms.

We have made good progress toward that goal. Between 2018 and 2023, we reduced the energy per wafer for EUV lithography by almost 40%. And we have a roadmap for another 20% of reductions by 2025.

The new normal Sustainability is now becoming a business driver at ASML, due partly to the corporate commitment and partly to the internal motivation of individuals. Our Green ASML employee network has over 2,000 people looking at everything from the food we serve in the cafeteria to system energy consumption. We’ve even had internal ‘Shark Tank’ style events to generate new ideas to make our whole operation more sustainable.

CORPORATE GOVERNANCE

Many of that initial team – including myself – are still active in driving a sustainable innovation culture within ASML. We are looking to embed sustainability even more fully into ASML’s PGP, because you get better results faster and at lower cost if you build sustainability in from the start. To this end, our system design specifications – the handbook for what we want to achieve in a new system – now include maximum power consumption and a power breakdown as standard. By making sustainability part of our standard processes, we have switched on the innovation power of 20,000 ASML engineers.

FINANCIALS

A greener future We are also looking at the materials we use to build our systems. There are standard ways of estimating the sustainability of materials in terms of their energy cost to produce and recyclability, but they are very approximate. We want to develop more accurate methods based on actual materials and processes. The sustainability of materials could then become another driver for innovation. Sustainable innovation is becoming part of our business as usual, just another design specification for our engineers alongside performance, cost and time to delivery. Because, in the end, all those factors must be balanced. Our sustainability efforts only have value if they come in a system that meets our customers’ business needs.

89

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Circular economy We aim to maximize the value of our systems, reusing resources as much as possible, while minimizing waste, decoupling our growth from resource consumption, and recycling materials.

IN THIS SECTION

Why it matters

92 93 94 96 98

Our materiality assessment identified the impact of our use of materials and resources as a material topic – and our focus on a circular economy is the cornerstone of our commitment to managing this challenge.

Our overall performance in 2023 Prevent waste Extend the lifetime of our products Reuse resources Recycle materials

A circular economy enables sustainable economic growth by creating business loops, ensuring efficient use of resources and driving an innovative business model. This approach is an essential part of decoupling our growth from the increasing consumption of resources.

Our circular economy strategy is based on the following four principles:

How we’re managing our impact

• Prevent waste A successful transition toward a circular economy means improved designs, operational resilience, reduced emissions and reduced costs. Improved designs are achieved through learning from use cases – both successes and failures – to improve products, solutions and processes. The availability of parts and access to material to support ASML’s growth, while decoupling it from material consumption and closing the loops, will be key for operational resilience. This will lead to reduced emissions through disposing locally and eliminating waste ending in incineration, energy recovery and landfill. Cost reduction can be achieved by optimizing the amount of purchased goods while avoiding surplus and reusing resources to eliminate waste. In summary, ASML’s approach to circular economy is designing products for longevity and reuse, creating closed-loop supply chains and encouraging the recycling of materials.

• Extend lifetime • Reuse resources • Recycle materials

Through our circular economy initiative, we aim to ensure our products and services retain and create as much value as possible for us and our partners in the ecosystem.

95%

88%

8,279 t

300 kg

55%

Systems sold in the past 30 years still active in the field

Reuse rate of parts returned from field and factory

Total waste from operations

Waste generated per €m revenue

Recycling rate

(2025 target: >95%)

(2025 target: 95%)

(excl. construction)

(2025 target: 209 kg)

(excl. construction) (2025 target: 90%)

90

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Circular economy (continued)

The diagram on the right illustrates our circular economy approach. We have an ambition to reduce waste in our operations: By 2030, we aim to send zero waste from operations to landfill or incineration1.

We have therefore developed a strategy which includes the following principles: • Prevent waste from our assets, systems and processes by redesigning them, in collaboration with our suppliers and customers, to limit their environmental impact • Extend the lifetime and productivity of our systems and assets to maximize their usage throughout their life cycles • Reuse resources, parts, tools, packaging and goods across the value chain • Recycle materials if we can no longer apply any of the previous principles, avoiding incineration and landfill

1. Incineration is defined to include processes with and without energy recovery.

Our circular economy approach

Our different types of waste We measure our impact in tonnes of waste, by category (hazardous and non-hazardous) and by material type (such as plastics, paper, wood and hazardous liquids). We include data on the CO2e impact of processing our waste in our scope 3 emissions. Within our operations, we divide our waste into two broad categories: Non-hazardous waste, such as packaging material, product-related waste from parts resulting from upgrades or defects, and general waste. This category also includes construction waste from building activities – the amount of construction waste tends to fluctuate over the years. Hazardous waste, such as the chemicals we use in our manufacturing processes. This can include everything from lamps, batteries and liquids to cleaning wipes and filters. Most of our hazardous waste is in the form of liquids, including acetone and piranha acid.

91

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

92

Circular economy (continued) On track

•

Ongoing focus area n

Our overall performance in 2023 Progress tracking Topic

Target 2025

Performance indicator

Circular economy

>95% 95% No target No target 209 kg/€m 90% No target

% of lithography systems sold in the past 30 years still active in the field Reuse rate of parts returned from field and factory Savings from reused parts (€, in millions) Value of scrapped parts (€, in millions)1 Total waste from operations (excl. construction2) normalized to revenue Recycling rate (excl. construction2) Total waste from operations (excl. construction2) (in tonnes)

2021

2022

2023

Status

94% 85% 686 269 305 77% 5,679

95% 87% 781 146 315 75% 6,675

95% 88% 1,311 206 300 55% 8,279

• •

1. This reporting indicator follows the principle of prior-year indicator ‘Value of scrapped parts (in € millions)'; however it does not include packaging. The 2022 comparative figure has been restated. 2. Construction waste is excluded from the calculation of this indicator. The amount of construction waste tends to fluctuate over the years and can therefore make the trend of the indicator unclear. Read more about our performance indicators (PIs) and related results in Non-financial statements – Non-financial indicators – Circular economy

In 2023, 43% of the total waste from operations (including construction waste) was sent to landfill, incineration with energy recovery or incineration (2022: 25%).

Our total amount of waste increased due to ASML’s growth, despite the impact of projects to reduce waste. However, the amount of waste from operations normalized to revenue showed a decrease in 2023.

The presence of hazardous materials is a risk to our ability to achieve our goal of sending zero waste from operations to landfill or incineration. In some countries, there is also the risk that our waste hauler may not be able to identify companies able to recycle some of our waste.

During the year, 7% of total waste (653 tonnes) was related to construction (2022: 238 tonnes, or 3%). The amount of construction waste increased compared to 2022. During 2023, significant demolition activities were ongoing on our Veldhoven main campus. Since we hand over the responsibility of the construction sites to the building contractor, the demolition waste is excluded from our waste data. Although we do not report on it, we work with our contractors to try to ensure maximum recycling of this waste.

Our total waste in 2023 15,000

In tonnes

In 2023, we generated 8,932 tonnes of waste from our operations overall (including construction waste). This was an increase of 29% over 2022 (6,913 tonnes).

10,000

8,932

8,279 -653

5,000 -4,552 -3,726 0 Total waste 2023

Construction waste

Total waste (excl. construction)

Total waste recycled

Total waste to Incineration or landfill

n/a n/a n n

n/a

ASML ANNUAL REPORT 2023

ENVIRONMENTAL CONTINUED

STRATEGIC REPORT

CORPORATE GOVERNANCE

FINANCIALS

Circular economy (continued) Prevent waste

How we’re managing our impact The first principle of our circular economy is to prevent waste. This involves eliminating or limiting waste at its source by rethinking and redesigning processes to avoid waste, focusing on design, sourcing and quality, among others. We aim to design our systems, products and processes to maximize their value by focusing on commonality, modularity, compatibility, standardization, reusability, reliability and recyclability, while opting for mono-material components and eco-design methodology, minimizing the use of critical raw materials like rare earths and hazardous materials. We aim to collaborate with product- and non-productrelated suppliers that deliver durable and efficient products with recycled material, which can be upgraded, refurbished, repaired, reused and recycled. We improve the quality of our systems by avoiding defects on arrival, and implementing lean principles in all processes, specifically in manufacturing and logistics, to eliminate waste. We design our systems to last for as long as possible in order to prevent waste. Built-in feedback loops ensure that we continuously improve product designs by learning from failure modes and repair activities.